Abstract A micro X-ray fluorescence (μ-XRF) spectrometry instrument based on an assembled X-ray optics was constructed in the laboratory. The assembled X-ray optics consisted of a polycapillary slightly focusing X-ray lens and a tapered monocapillary X-ray lens (TMXRL). The output X-ray beam of the polycapillary slightly focusing X-ray lens was focused again by the TMXRL. A TMXRL with output aperture of 12.01 μm was drawn by a nested glass tube. To evaluate the performance of the instrument, a performance comparison between different capillary X-ray optics was conducted. The intensity of the Fe Kα from an iron plate was used to indicate the analysis efficiency of the μ-XRF instrument. The relative gain of the instrument was corrected by comparing the intensity per unit area for a pinhole aperture. Compared with TMXRL single used, the assembled X-ray optics also had a micro focal spot. Furthermore, the relative gain of the assembled X-ray optics and the intensity of the Fe Kα from the iron plate obtained by the assembled X-ray optics were approximately 5 times those of the TMXRL single used. This highly intense micro X-ray beam with several diameters obtained by the assembled X-ray optics will be useful for μ-XRF analysis.

中文翻译：

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由多毛细管 X 射线光学器件和单毛细管 X 射线光学器件组成的用于微 X 射线荧光光谱测定的组装 X 射线光学器件的性能

摘要 在实验室搭建了一台基于组装式X射线光学器件的微型X射线荧光（μ-XRF）光谱仪。组装的 X 射线光学器件由多毛细管微聚焦 X 射线透镜和锥形单毛细管 X 射线透镜 (TMXRL) 组成。多毛细管微聚焦 X 射线透镜的输出 X 射线束被 TMXRL 再次聚焦。输出孔径为 12.01 μm 的 TMXRL 由嵌套玻璃管绘制。为了评估仪器的性能，我们对不同的毛细管 X 射线光学器件进行了性能比较。来自铁板的 Fe Kα 的强度用于指示 μ-XRF 仪器的分析效率。通过比较针孔孔径的单位面积强度来校正仪器的相对增益。与TMXRL单独使用相比，组装的 X 射线光学器件也有一个微焦斑。此外，组装的 X 射线光学器件的相对增益和由组装的 X 射线光学器件获得的来自铁板的 Fe Kα 的强度大约是使用的 TMXRL 的 5 倍。这种由组装的 X 射线光学器件获得的具有多个直径的高强度微 X 射线束将用于 μ-XRF 分析。