A simple, yet precise, optical angle measurement device was developed by analyzing the light interference pattern from a modified Lloyd’s mirror interferometer combined with a CMOS camera sensor. The resulting spatially heterodyned signal was very sensitive to small angle changes from an incident low-power laser beam, with an accuracy better than 8.9 arcsec over a range of 1.47 degrees. Measurement dead zones, estimated to have an angular span of ± 0.96 arcmin, occurred in the middle of the device’s measurement range at a critical angle where the pitches of the light interference pattern and the CMOS sensor array were equal. Also, a proof-of-concept test successfully demonstrated the use of this device for dual-axis angle measurements using a single CMOS sensor.

通过分析来自修改后的劳埃德反射镜干涉仪与CMOS摄像头传感器结合的光干涉图样，开发出一种简单而精确的光学角度测量设备。所得到的空间外差信号对入射的低功率激光束的微小角度变化非常敏感，在1.47度范围内的精度优于8.9 arcsec。在设备的测量范围的中间，临界角为光干涉图样和CMOS传感器阵列的间距相等时，估计死角估计为±0.96 arcmin。此外，概念验证测试成功地证明了该设备在使用单个CMOS传感器进行双轴角度测量中的使用。