Abstract

In this study, NbTi-N_X and NbTi-N₁₂-CH coatings were prepared using radio frequency magnetron sputtering on high-speed steel substrates, where X represents the flow rate of nitrogen and CH represents a coating containing carbon and hydrogen integrated with acetylene. The crystalline phases were characterized using x-ray diffraction, and the surface and cross-sectional structures were analyzed using scanning electron microscopy. The x-ray diffractometry results revealed that except for the NbTi-N₈ and NbTi-N₁₂-CH coatings, all other coatings exhibited a crystalline phase. Five peaks were observed for the NbTi-N₁₂ coating as follows: TiN (111), (200), and (222) and Nb₂N (110) and (112). Thus, this structure had the most diversified orientations. The x-ray photoelectron spectroscopy results revealed that only the NbTi-N₄ coating had pure niobium- and titanium-binding energies. For the other coatings, some Nb-N and Ti-N bonds were oxidized to form Nb-ON and Ti-ON, respectively. Regarding the mechanical properties, the NbTi-N₁₂ coating had the highest hardness value (26.6 GPa). A wear test was conducted with a load of 5 N, and the NbTi-N₁₂ coating exhibited the lowest wear rate in the NbTi-N_X coating series. Conversely, the NbTi-N₁₂-CH coating had the best tribological properties, such as the lowest friction coefficient (0.137), wear depth (0.203 μm), and wear rate (0.85 × 10⁻⁶ mm³/Nm). For the substrate wear performance, the wear depth and wear rate were approximately 13.7 and 13.2 times higher than those of the substrate with the NbTi-N₁₂-CH coating, respectively. We applied the NbTi-N₁₂-CH coating to a micro-drill and tested it by high-speed drilling 2000, 4000, and 6000 holes. The results revealed that when this coating was applied to micro-drills, their drill life could be increased to 4000 holes, which is twice that of an uncoated micro-drill.

中文翻译：

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射频磁控溅射制备NbTi-N X和NbTi-N 12 -CH涂层的力学和摩擦学性能及其在微钻中的应用

摘要

在这项研究中，使用射频磁控溅射在高速钢基底上制备了NbTi-N _X和NbTi-N ₁₂ -CH涂层，其中X表示氮的流速，CH表示包含碳和氢并结合有乙炔的涂层。使用X射线衍射表征结晶相，并使用扫描电子显微镜分析表面和横截面结构。X射线衍射结果表明，除了NbTi-N ₈和NbTi-N ₁₂ -CH涂层外，所有其他涂层均表现出结晶相。NbTi-N ₁₂涂层观察到五个峰，如下所示：TiN（111），（200）和（222）和Nb ₂N（110）和（112）。因此，这种结构具有最多样化的取向。X射线光电子能谱结果表明，只有NbTi-N ₄涂层具有纯的铌和钛结合能。对于其他涂层，一些Nb-N和Ti-N键被氧化形成Nb-ON和Ti-ON。关于机械性能，NbTi-N ₁₂涂层具有最高的硬度值（26.6 GPa）。在5 N的负载下进行了磨损测试，并且NbTi-N ₁₂涂层在NbTi-N _X涂层系列中表现出最低的磨损率。相反，NbTi-N ₁₂-CH涂层具有最佳的摩擦学性能，例如最低的摩擦系数（0.137），磨损深度（0.203μm）和磨损率（0.85×10 ^-6  mm ³ / Nm）。对于基底的磨损性能，其磨损深度和磨损率分别比具有NbTi-N ₁₂ -CH涂层的基底的磨损深度和磨损率高约13.7倍和13.2倍。我们将NbTi-N ₁₂ -CH涂层应用于微钻，并通过高速钻2000、4000和6000孔对其进行了测试。结果表明，将这种涂层应用于微钻时，它们的钻头寿命可以增加到4000个孔，是未镀膜微钻的两倍。