Atomic oxygen and ozone are essential reactive species in plasma oxidation processes. Pure oxygen discharge is preferable to produce atomic oxygen and ozone while a difficulty in measuring their local densities exists. The ozone density is typically measured by UV absorption, but its resolution is insufficient for measuring the local ozone density in filamentary discharges. The atomic oxygen density can be measured by two-photon absorption laser-induced fluorescence (TALIF) method. However, ozone interference from the in situ atomic oxygen production due to ozone fragmentation by the incident UV light disturbs the TALIF measurement of the discharge-originated atomic oxygen. Therefore, compensation for ozone interference is necessary in atomic oxygen measurements. In this study, we propose a method to separate ozone interference from the discharge-originated atomic oxygen signal by focusing on different TALIF signal dependence on the laser intensity between atomic oxygen d...

中文翻译：

---

在大气压力下同时测量纯氧脉冲势垒放电中原子氧和臭氧的局部密度

原子氧和臭氧是等离子体氧化过程中必不可少的反应性物质。优选纯氧放电以产生原子氧和臭氧，同时存在测量其局部密度的困难。臭氧密度通常通过紫外线吸收来测量，但其分辨率不足以测量丝状放电中的局部臭氧密度。原子氧密度可以通过二光子吸收激光诱导荧光（TALIF）方法来测量。但是，由于入射紫外线造成的臭氧碎裂，原位产生的原子氧产生的臭氧干扰会扰乱放电源原子氧的TALIF测量。因此，在原子氧测量中必须补偿臭氧干扰。在这个研究中，