Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm2 and 23 μH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

中文翻译：

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通过自卷式膜技术实现整体式磁悬浮水平磁感应。

特斯拉到特斯拉级别的单片强磁感应为物理，化学和医疗系统提供必不可少的功能。当前的设计选项受到三维（3D）结构构造，电流处理和磁性材料集成中现有功能的限制。我们在这里报告通过汽相自卷式膜（S-RuM）纳米技术结合滚后集成，将大面积和相对较厚（约100至250 nm）的2D纳米膜转变为多匝3D空心微管。毛细力作用的铁磁磁性材料的制备。在蓝宝石上设计和测试了数百个S-RuM功率电感器，最大工作频率超过500 MHz。对于单个微管电感器，在10 kHz时的电感为1.24μH，相应的面积和体积电感密度分别为3μH/ mm2和23μH/ mm3。磁感应强度的模拟强度在10 MHz的制造设备中达到了数十mtesla。