The initial stages of particle formation are important in several industrial and environmental systems; however, the phenomenon is not completely understood due to the inability to measure cluster size distributions. A high resolution differential mobility analyzer with an electrometer was used to map out the early stages of Si particle formation from pyrolysis of SiH4 in a furnace aerosol reactor. We detected for the first time subnanometer stable clusters from silane pyrolysis, and the diameter was measured to be about 0.7 nm. This diameter is within the range of probable sizes that the reported families of critical silane clusters could have based on their actual molecular structure. The size distributions of negative clusters are also mapped out. In addition, gas chromatography mass spectrometry, and transmission electron microscopy characterizations of the clusters and primary particles are used to assess their mechanistic roles in aerosol dynamics of the initial stages of particle formation.

中文翻译：

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在炉内气溶胶反应器中进行硅烷热解过程中亚2 nm稳定簇的测量。

颗粒形成的初始阶段在一些工业和环境系统中很重要。但是，由于无法测量簇大小分布，因此无法完全理解该现象。使用带静电计的高分辨率差动迁移率分析仪，可以绘制出在炉气溶胶反应器中SiH4的热解过程中形成Si颗粒的早期阶段。我们首次从硅烷热解中检测到了亚纳米级的稳定簇，并且测得的直径约为0.7 nm。该直径在报道的关键硅烷簇家族根据其实际分子结构可能具有的尺寸范围内。负簇的大小分布也被映射出来。另外，气相色谱质谱法