Abstract To improve the wide-temperature applicability of amorphous carbon-based films, a novel a-C/(WC/a-C) film compositing of a-C nano-layers and super-latticed WC/a-C nano-multilayers was proposed and successfully fabricated on M50NiL substrate by an unbalanced magnetron sputtering system. For comparison, a monolayer a-C film and a super-latticed WC/a-C film were also prepared on the same substrates. The microstructures, mechanical properties and thermal stability of the as-deposited films were investigated. Particularly, the tribological behaviors of films against M50 counterpart were evaluated at the temperatures ranging from 25 °C to 350 °C. The results showed that because of the excellent thermal stability of super-latticed WC/a-C sublayers, the a-C/(WC/a-C) film has effectively overcome the poor tribological performance of a-C film at high temperatures (≥200 °C). While benefiting from the good toughness of a-C sublayers, the a-C/(WC/a-C) film showed significant better wear resistance than the WC/a-C film at the temperatures of 25–200 °C. The best wide-temperature applicability of the novel a-C/(WC/a-C) film should be attributed to the favorable mechanical properties, together with the formations of carbon-rich transfer film at 25–150 °C and WO3-rich transfer film at 200–350 °C.

中文翻译：

---

新型宽温适用 aC/(WC/aC) 薄膜对 M50 钢的摩擦学性能

摘要 为提高非晶碳基薄膜的宽温适用性，提出了一种由 aC 纳米层和超晶格 WC/aC 纳米多层复合而成的新型 aC/(WC/aC) 薄膜，并成功地在 M50NiL 衬底上制备。不平衡磁控溅射系统。为了比较，还在相同的基板上制备了单层 aC 膜和超晶格 WC/aC 膜。研究了沉积薄膜的微观结构、机械性能和热稳定性。特别是，在 25°C 至 350°C 的温度范围内评估了薄膜对 M50 对应物的摩擦学行为。结果表明，由于超晶格WC/aC亚层优异的热稳定性，aC/(WC/aC)薄膜有效克服了aC薄膜在高温（≥200℃）下摩擦学性能差的问题。在受益于 aC 亚层良好的韧性的同时，aC/(WC/aC) 薄膜在 25-200 °C 的温度下表现出明显优于 WC/aC 薄膜的耐磨性。新型 aC/(WC/aC) 薄膜的最佳宽温适用性应归因于良好的机械性能，以及在 25-150 °C 下形成的富碳转移膜和在 200 °C 下形成的富碳转移膜–350°C。