Micro-channels are one of the most common surface textures for applications, however, the machining of micro-channels on polycrystalline diamond (PCD) is still facing challenges due to its intrinsic properties of high brittleness and hardness. In this paper, fabrication of micro-channels by laser induced plasma (LIP) and laser ablation directly (LAD) machining methods on PCD surface is experimentally investigated. For comparing the processing capacity, the influence of different laser process parameters (including overlap, power, frequency, scanning speed and the number of passes) on the geometry and material removal rate of micro-channels is assessed. Results show that the process parameters have a significant influence on the formation of micro-channels, and LIP exhibits higher efficiency compared to LAD in the case of the plasma formation with the high overlap and laser power. The micro-channel depth and width produced by LIP increase with the increasing overlap, laser power and number passes, and that reduce with the increasing frequency and scanning speed; the MRR produced by LIP increases with the increasing overlap, laser power and scanning speed, and that reduces with the increasing frequency and number of passes. Meanwhile, LIP reduces the oxidation reaction inside the micro-channels compared to LAD due to the shielding effect of distilled water.

微通道是应用中最常见的表面纹理之一，但是，由于其高脆性和硬度的内在特性，在多晶金刚石（PCD）上加工微通道仍然面临挑战。本文研究了在PCD表面上通过激光诱导等离子体（LIP）和直接激光烧蚀（LAD）加工方法制造微通道的方法。为了比较处理能力，评估了不同激光工艺参数（包括重叠，功率，频率，扫描速度和通过次数）对微通道的几何形状和材料去除率的影响。结果表明，工艺参数对微通道的形成有重大影响，与LAD相比，在具有高重叠和高激光功率的等离子体形成情况下，LIP的效率更高。LIP产生的微通道深度和宽度随着重叠的增加，激光功率和通过次数的增加而增加，并且随着频率和扫描速度的增加而减小；LIP产生的MRR随着重叠，激光功率和扫描速度的增加而增加，而随着频率和通过次数的增加而降低。同时，由于蒸馏水的屏蔽作用，与LAD相比，LIP减少了微通道内部的氧化反应。LIP产生的MRR随着重叠，激光功率和扫描速度的增加而增加，而随着频率和通过次数的增加而降低。同时，由于蒸馏水的屏蔽作用，与LAD相比，LIP减少了微通道内部的氧化反应。LIP产生的MRR随着重叠，激光功率和扫描速度的增加而增加，而随着频率和通过次数的增加而降低。同时，由于蒸馏水的屏蔽作用，与LAD相比，LIP减少了微通道内部的氧化反应。