Thin films of metal–organic frameworks (MOFs) are promising for a wide range of applications including membranes for separations and sensor materials in microelectronics. Growth of such thin films using atomic/molecular layer deposition (ALD/MLD) has recently been demonstrated; however, the range of examples is still narrow. Here, we expand the repertory of gas-phase MOF thin film synthesis by ALD/MLD to include 2,6-naphthalenedicarboxylate (2,6-NDC) and biphenyl-4,4′-dicarboxylate (BP-4,4′-DC) as organic linkers. The films, which were deposited using ZrCl₄ and either H₂–2,6-NDC or H₂–BP-4,4′-DC, were amorphous and formed crystalline MOF-structures when treated with acetic acid vapour at 160 °C. The film growth was investigated using in situ quartz crystal microbalance (QCM) measurements, and was in addition characterized using spectroscopic ellipsometry (SE), photoluminescence (PL), scanning electron microscopy (SEM), grazing incidence X-ray diffraction (GIXRD) and X-ray reflectivity (XRR). We further performed introductory investigations into a selection of possible future applications of these films, due to their porosity, luminescent and antibacterial properties. Expanding the repertory of MOF synthesis by ALD/MLD to include longer linkers such as 2,6-NDC and BP-4,4′-DC enables synthesis of thin films with a larger range of pore sizes.

中文翻译：

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通过分子层沉积生长的具有双芳香族连接基的MOF薄膜

金属有机框架（MOF）薄膜有望在广泛的应用中使用，包括微电子中的分离膜和传感器材料。最近已证明使用原子/分子层沉积（ALD / MLD）来生长此类薄膜；但是，示例范围仍然很窄。在这里，我们扩展了通过ALD / MLD合成气相MOF薄膜的方法，使其包括2,6-萘二甲酸二甲酯（2,6-NDC）和联苯-4,4'-二羧酸酯（BP-4,4'-DC ）作为有机连接物。使用ZrCl ₄和H ₂ –2,6-NDC或H ₂ –BP-4,4'-DC沉积的薄膜是非晶态的，并在160°C下用乙酸蒸汽处理时形成晶体MOF结构。 。使用原位研究膜的生长石英晶体微天平（QCM）的测量，此外还使用椭圆偏振光谱（SE），光致发光（PL），扫描电子显微镜（SEM），掠入射X射线衍射（GIXRD）和X射线反射率（XRR）进行了表征。由于它们的多孔性，发光性和抗菌性，我们进一步对这些膜的未来可能应用进行了选择研究。通过ALD / MLD扩展MOF合成的范围，使其包含更长的接头（例如2,6-NDC和BP-4,4'-DC），可以合成孔径范围更大的薄膜。