当前位置: X-MOL 学术Mater. Lett. › 论文详情
Our official English website, www.x-mol.net, welcomes your feedback! (Note: you will need to create a separate account there.)
A metal lift-off process through hyperbolic undercut of laser heat-mode lithography
Materials Letters ( IF 3 ) Pub Date : 2020-04-01 , DOI: 10.1016/j.matlet.2020.127344
Zhengwei Wang , Kui Zhang , Guodong Chen , Zhendong Zhu , Yang Wang , Jingsong Wei

Abstract Laser heat-mode lithography is an important method for the fabrication of micro and nanostructure. A metal lift-off method through hyperbolic undercut of laser heat-mode lithography was proposed. In this method, a desirable hyperbolic undercut profile was used to replace the inverted trapezoid undercut, and the hyperbolic undercut profile can be obtained through laser heat-mode lithography technique. Cr structures of gratings, grids and planar spiral inductor with a minimum linewidth of 0.42 μm and a height of 100 nm were obtained successfully. These indicate that the lift-off process through hyperbolic undercut of laser heat-mode lithography can be used to fabricate the submicron metal structures.

中文翻译:

通过激光热模光刻双曲线底切的金属剥离工艺

摘要 激光热模光刻技术是制备微纳米结构的重要方法。提出了一种通过激光热模光刻双曲线底切的金属剥离方法。在该方法中,采用理想的双曲底切轮廓代替倒梯形底切,通过激光热模光刻技术可以获得双曲底切轮廓。成功获得了最小线宽为 0.42 μm 和高度为 100 nm 的光栅、栅格和平面螺旋电感器的 Cr 结构。这些表明通过激光热模式光刻的双曲线底切的剥离工艺可用于制造亚微米金属结构。
更新日期:2020-04-01
down
wechat
bug