A compact electrostatic discharge (ESD) protection cell is proposed for multi-band millimeter-wave (MMW) circuits in nanoscale CMOS technology. The proposed ESD protection cell consists of a silicon-controlled rectifier (SCR) and a diode as the main ESD protection devices, and an inductor in this cell is divided into several sections to resonate at multifrequencies. The proposed design has been demonstrated for 28- and 67-GHz applications. The measurement results show that the proposed design exhibits lower loss at the specified frequency bands, higher ESD robustness, and sufficiently small layout area. Therefore, the novel compact ESD protection cell will be better for multi-band MMW applications in CMOS technology.

中文翻译：

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适用于多波段毫米波应用的紧凑型 ESD 保护单元 [-.3pc]

针对采用纳米级 CMOS 技术的多频段毫米波 (MMW) 电路提出了一种紧凑型静电放电 (ESD) 保护单元。所提出的ESD保护单元由作为主要ESD保护器件的可控硅整流器(SCR)和二极管组成，并且该单元中的电感器被分成几个部分以在多频率谐振。所提议的设计已针对 28 GHz 和 67 GHz 应用进行了演示。测量结果表明，所提出的设计在指定频段具有更低的损耗、更高的 ESD 鲁棒性和足够小的布局面积。因此，新型紧凑型 ESD 保护单元将更适合 CMOS 技术中的多波段 MMW 应用。