Semi-polar micro-LEDs have gain increasing interests due to the advantages of polarization control and quantum efficiency improvement. In this work, a novel semi-polar (20–21)-plane micro-LEDs array has been designed and manufactured. In comparison with c-plane micro-LEDs, semi-polar micro-LEDs indicate better electrical and optical performance. The relative EQE of semi-polar micro-LEDs remains at 62% under the injected current density of 775.6 A/cm2, which indicates a reduced efficiency droop due to less polarization in MQWs. It has been further proved by a significant reduction of 55% in emission peak blue-shift under the injected current density from 11.1 A/cm2 to 775.6 A/cm2. In addition, the carrier recombination dynamics and spatial light distribution of semi-polar micro-LEDs with different pixel sizes have been studied. Fast recombination lifetime in smaller size semi-polar micro-LEDs indicates a promising way to be used as a high modulation bandwidth light source. Stable and uniform light distribution in a wider range of spatial azimuths further supports for the semi-polar micro-LEDs as a strong candidate for the applications of high-resolution display and high-speed visible light communication.

中文翻译：

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高性能半极性 InGaN/GaN 绿色微型发光二极管

由于偏振控制和量子效率提高的优势，半极性微型 LED 越来越受到关注。在这项工作中，设计并制造了一种新型的半极性 (20-21) 平面微型 LED 阵列。与 c 面微型 LED 相比，半极性微型 LED 具有更好的电学和光学性能。在 775.6 A/cm2 的注入电流密度下，半极性 micro-LED 的相对 EQE 保持在 62%，这表明由于 MQW 中的极化较少，效率下降降低。在注入电流密度从 11.1 A/cm2 到 775.6 A/cm2 下，发射峰蓝移显着降低了 55%，进一步证明了这一点。此外，还研究了不同像素尺寸的半极性 micro-LED 的载流子复合动力学和空间光分布。较小尺寸的半极性微型 LED 的快速复合寿命表明了一种用作高调制带宽光源的有前途的方法。在更广泛的空间方位角上稳定均匀的光分布进一步支持半极性微型 LED 作为高分辨率显示和高速可见光通信应用的有力候选者。