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Accurate thickness measurement using a single terahertz pulse obtained in ambient atmosphere
Optics Communications ( IF 2.4 ) Pub Date : 2020-05-01 , DOI: 10.1016/j.optcom.2020.125276
Jinwoo Lee , Jindoo Choi , Soohyun Kim

Abstract Terahertz (THz) radiation suffers severe signal loss due to the high absorptivity of water vapor abundant in normal atmosphere, greatly limiting its potential in noninvasive material characterization. We propose a novel THz signal processing method that enables effective extraction of hidden sample information leading to accurate thickness determination. The thicknesses of multiple silicon wafers are measured using only a single THz pulse obtained in ambient atmosphere without any prior sample information. The results verify our proposed approach to achieve accurate and precise characterization of materials in a realistic environment.

中文翻译:

使用在环境大气中获得的单个太赫兹脉冲进行准确的厚度测量

摘要 太赫兹 (THz) 辐射由于对正常大气中丰富的水蒸气的高吸收率而遭受严重的信号损失,极大地限制了其在非侵入性材料表征中的潜力。我们提出了一种新颖的太赫兹信号处理方法,可以有效提取隐藏的样本信息,从而实现准确的厚度确定。多个硅晶片的厚度仅使用在环境大气中获得的单个太赫兹脉冲进行测量,无需任何先前的样品信息。结果验证了我们提出的在现实环境中实现材料准确和精确表征的方法。
更新日期:2020-05-01
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