Four Ti-Al-N/Ta-Al-N multilayer coatings were developed by a hybrid process combining arc evaporated Ti_0.55Al_0.45N and sputtered Ta_0.57Al_0.43N or Ta_0.77Al_0.23N layers. The two Ti_0.55Al_0.45N/Ta_0.57Al_0.43N multilayers have a bilayer period (Λ) of 41 and 25 nm, and the two Ti_0.55Al_0.45N/Ta_0.77Al_0.23N multilayers have Λ = 42 and 26 nm, respectively. These are compared with Ti_0.51Al_0.43Ta_0.06N/Ta_0.77Al_0.23N multilayers having Λ ~40, 33, 25, and 13 nm and are composed of arc evaporated Ti_0.51Al_0.43Ta_0.06N and sputtered Ta_0.77Al_0.23N layers. The smallest bilayer period of ~13 nm was realised without mechanical shutters, simply by using the two-fold substrate rotation and target arrangement.

The alternating growth of Ta_0.57Al_0.43N respectively Ta_0.77Al_0.23N layers with arc evaporated Ti_0.55Al_0.45N or Ti_0.51Al_0.43Ta_0.06N layers allows for full crystallisation in a single-phase face-centred cubic structure, although monolithically grown, these exhibit additional ε-TaN and/or wurtzite AlN-type phases.

The mechanical properties of our eight different multilayers indicate a dependence on their bilayer period. Highest hardness (33.6 ± 1.1 GPa) combined with a low indentation modulus (375 ± 9 GPa) could be realised by Ti_0.51Al_0.43Ta_0.06N/Ta_0.77Al_0.23N coatings with Λ = 13 nm, whereas the Ti_0.55Al_0.45N/Ta_0.77Al_0.23N multilayer with Λ = 42 exhibits the lowest hardness (31.1 ± 2.1 GPa) combined with a high indentation modulus (392 ± 25 GPa).

通过结合电弧蒸发的Ti _0.55 Al _0.45 N和溅射的Ta _0.57 Al _0.43 N或Ta _0.77 Al _0.23 N层的混合工艺开发了四种Ti-Al-N / Ta-Al-N多层涂层。两个Ti _0.55 Al _0.45 N / Ta _0.57 Al _0.43 N多层膜的双层周期（Λ）为41和25 nm，两个Ti _0.55 Al _0.45 N / Ta _0.77 Al _0.23 N多层膜的Λ= 42和26 nm，分别。将它们与Ti _0.51 Al _0.43 Ta _0.06 N / Ta进行比较具有Λ〜40、33、25和13 nm的_0.77 Al _0.23 N多层膜，由电弧蒸发的Ti _0.51 Al _0.43 Ta _0.06 N和溅射的Ta _0.77 Al _0.23 N层组成。只需使用两倍的基板旋转和目标排列，即可在没有机械快门的情况下实现约13 nm的最小双层周期。

Ta _0.57 Al _0.43 N和Ta _0.77 Al _0.23 N层与电弧蒸发的Ti _0.55 Al _0.45 N或Ti _0.51 Al _0.43 Ta _0.06 N层的交替生长允许单晶面心立方结构的完全结晶在生长时，它们表现出额外的ε-TaN和/或纤锌矿AlN型相。

我们的八个不同多层的机械性能表明它们取决于双层周期。Ti _0.51 Al _0.43 Ta _0.06 N / Ta _0.77 Al _0.23 N涂层（Λ= 13 nm ）可实现最高的硬度（33.6±1.1 GPa）和低的压痕模量（375±9 GPa），而Ti _0.55 Al _0.45 Λ= 42的N / Ta _0.77 Al _0.23 N多层膜表现出最低的硬度（31.1±2.1 GPa）和高的压痕模量（392±25 GPa）。