Atomic Force Microscope‐Based Meniscus‐Confined Three‐Dimensional Electrodeposition,Advanced Materials Technologies

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Atomic Force Microscope‐Based Meniscus‐Confined Three‐Dimensional Electrodeposition
Advanced Materials Technologies ( IF 6.4 ) Pub Date : 2020-01-09 , DOI: 10.1002/admt.201900827
David Eliyahu ₁ , Eliezer Gileadi ₂ , Ehud Galun ₃ , Noam Eliaz ₁

Affiliation

The development of a 3D electrochemical deposition system, which combines meniscus‐confined electrodeposition (MCED) with atomic force microscope (AFM) closed‐loop control and has a submicron resolution, is described. Thanks to the high rigidity of the hollow borosilicate glass (or quartz) tip and quartz crystal tuning fork (QTF), combined with the QTF's high force sensitivity, the use of a solution‐filled AFM tip in air is successful. The AFM control enables full automation and in situ growth control. Using this scheme, 3D printing of high‐quality, fully dense, uniform and exceptionally smooth, freestanding straight and overhang pure polycrystalline copper pillars, with diameters ranging from 1.5 µm to 250 nm, and an aspect ratio > 100, is demonstrated. This process may be useful for manufacturing of high‐frequency terahertz antennas, high‐density interconnects, precision sensors, micro‐ and nano‐electromechanical systems, batteries, and fuel cells, as well as for repair or modification of existing micro‐sized or nano‐sized features.

中文翻译：

基于原子力显微镜的弯月面有限的三维电沉积

描述了结合了弯液面电沉积（MCED）和原子力显微镜（AFM）闭环控制并具有亚微米分辨率的3D电化学沉积系统的开发。由于空心硼硅酸盐玻璃（或石英）尖端和石英晶体音叉（QTF）的高刚性，再加上QTF的高力度灵敏度，在空气中成功使用了溶液填充的AFM尖端。AFM控制可实现完全自动化和原位生长控制。使用该方案，展示了3D打印高质量，完全致密，均匀且非常光滑，独立的直立且悬垂的纯多晶铜柱，直径从1.5 µm到250 nm，且纵横比> 100。此过程可能对制造高频太赫兹天线有用，

更新日期：2020-02-10

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