Abstract We present a two-dimensional (2D) optical phased array (OPA) with 8 × 8 elements in which light is electro-optically controlled by silicon phase modulators. The randomly distributed initial phases are calibrated through an interference technique to achieve a beam divergence of 0 . 9 2 ∘ × 0 . 3 2 ∘ and a scanning range of 8 . 9 ∘ × 2 . 2 ∘ . A bandwidth of 324 MHz and beam steering at a point-to-point speed of 20 MHz was realized on the fabricated chip. Systematic analysis revealed that the 2D electro-optical OPA is promising and feasible for many applications ranging from optical communication to light detection and ranging (LiDAR).

中文翻译：

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具有 8 × 8 元件的芯片级光学相控阵可实现快速光束控制

摘要 我们提出了一种具有 8 × 8 元件的二维 (2D) 光学相控阵 (OPA)，其中光由硅相位调制器进行电光控制。随机分布的初始相位通过干涉技术进行校准，以实现光束发散度为 0 。9 2 ∘ × 0 。3 2 ∘ 和 8 的扫描范围。9 ∘ × 2 。2 ∘ 。在制造的芯片上实现了 324 MHz 的带宽和 20 MHz 点对点速度的波束控制。系统分析表明，2D 电光 OPA 在从光通信到光检测和测距 (LiDAR) 的许多应用中具有前景和可行性。