Air flotation rails are widely used in semiconductor production lines for handling components such as liquid crystal glass substrates and wafers. In this study, the effects of the number and distribution radius of the orifices of the basic component (hereinafter referred to as air flotation unit) of the utilized air-suspension orbit were theoretically and experimentally investigated. The pressure distribution of the air flotation unit was first calculated using the Reynolds equation. The flotation forces and two-dimensional pressure fields of six different air flotation units with different numbers and distribution radii of the orifices were then experimentally measured. Based on the experimental data, we analyzed the effect of the inertia item of the flow, the impact of the no-flow region within the distribution circle, and the changes brought about by the number and distribution radius of orifice, etc. The findings of this study afford important theoretical and experimental references for the design of air flotation rails.

中文翻译：

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不同孔口数量和分布半径气浮装置受力特性及二维压力场

气浮导轨广泛用于半导体生产线，用于搬运液晶玻璃基板和晶片等组件。本研究从理论上和实验上研究了空气悬浮轨道基础部件（以下简称气浮装置）的孔口数量和分布半径的影响。首先使用雷诺方程计算气浮装置的压力分布。然后通过实验测量了具有不同数量和孔口分布半径的六个不同气浮装置的浮选力和二维压力场。基于实验数据，我们分析了流动惯性项的影响，分布圈内无流动区域的影响，