Abstract

In this article, material and process variables of sol–gel method are considered to investigate the texturing growth model of ZnO thin film in order to achieve ordinary, highly, and extremely preferred ZnO thin films. All the samples were fabricated by deposition of newly developed sol on conventional glass substrate via spin coating method and were further heat treated at various patterns. In sol variable, increasing the molar ratio of triethylamine to Zn increases preferred orientation along c-axis without using special heat treatment pattern. Various heat treatment parameters including drying and calcination are studied. The results demonstrate that drying at 300 °C is essential for achieving highly preferred ZnO thin film. In addition, calcination time, temperature, and repetition leads to more preferred sample to some extent. Furthermore, increasing the drying time at 300 °C causes significant increase of c-axis orientation and extremely preferential growth. In general, selection of an appropriate heat treatment pattern together with an accurate sol composition is necessary to achieve extremely preferred ZnO thin film with less energy conservation without using any special substrate. This is noteworthy that all the ZnO thin films are highly transparent in visible region and their band gap was around 3.3 eV.

中文翻译：

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用溶胶和热处理参数控制溶胶-凝胶衍生的ZnO薄膜的最佳取向取向

摘要

在本文中，考虑使用溶胶-凝胶法的材料和工艺变量来研究ZnO薄膜的纹理生长模型，以便获得普通的，高度推荐的和极受欢迎的ZnO薄膜。所有样品都是通过将新开发的溶胶通过旋涂法沉积在常规玻璃基板上而制成的，并以各种图案进一步热处理。在溶胶变量中，增加三乙胺与Zn的摩尔比会增加沿c的首选取向轴，无需使用特殊的热处理模式。研究了各种热处理参数，包括干燥和煅烧。结果表明，在300°C下干燥对于获得高度优选的ZnO薄膜至关重要。另外，煅烧时间，温度和重复在某种程度上导致更优选的样品。此外，增加在300℃下干燥时间导致的显著增加Ç轴定向和极其优惠的增长。通常，必须选择合适的热处理图案以及准确的溶胶组成，以在不使用任何特殊基材的情况下，以较少的能量节省来获得极为优选的ZnO薄膜。值得注意的是，所有ZnO薄膜在可见光区都是高度透明的，其带隙约为3.3 eV。