Fused silica optics used in lasing systems requires a high laser‐induced damage resistance. Processes typically used to polish fused silica lenses induce subsurface and surface damage that collect ceria abrasive, creating a layer of contamination. The contamination can be a precursor to laser damage during use. A preliminary study showed the feasibility of magnetic field‐assisted finishing (MAF) for polishing fused silica and suggested possible beneficial effects of the MAF‐polished surface on the laser‐induced damage threshold (LIDT). This paper proposes a method to examine the fundamental polishing characteristics of MAF for fused silica. Using the proposed method, this paper explores the material removal characteristics of the MAF process and improves the understanding of the MAF polishing mechanism. The 45% improvement of LIDT shows the efficacy of MAF for removing the contamination layer of fused silica surfaces with minimal changes in the surface roughness.

中文翻译：

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使用磁场辅助精加工去除熔融石英污染层

激光系统中使用的熔融石英光学元件需要很高的激光诱导的抗损伤性。通常用于抛光熔融石英透镜的工艺会引起表面和表面损伤，这些损伤会收集氧化铈磨料，形成一层污染。在使用过程中，污染物可能是激光损坏的先兆。初步研究显示了磁场辅助精加工（MAF）抛光熔融石英的可行性，并提出了MAF抛光表面对激光诱导损伤阈值（LIDT）可能产生的有益影响。本文提出了一种检查熔融石英MAF基本抛光特性的方法。使用提出的方法，本文探讨了MAF工艺的材料去除特性，并增进了对MAF抛光机理的了解。