In this study we present a novel dual-resonator temperature sensor which can be embedded in other MEMS sensors for improved thermal compensation and on-the-run calibration. For accurate temperature measurements, the proposed method mitigates time base errors in frequency counting, eliminates the need for a highly accurate reference clock and can cancel out the effects of aging of the time base without using a calibration process. The sensor structure is composed of a strain amplifying beam and two Double Ended Tuning Fork (DETF) resonators with different temperature sensitivities. The DETFs are kept at resonance simultaneously with a dual PLL circuit. Experiments reveal that at the expense of decreasing sensitivity, one can suppress the measurement errors which can be as high as 0.164 °C for the long resonator and 0.240 °C for the short resonator when a time base of 50 ppm accuracy is used. Moreover, while the frequency stability characteristics of the single sensing elements deteriorate drastically as the accuracy of the time base decreases, the frequency stability of the proposed frequency ratio remains unaffected and it is superior compared to both of the resonators.

中文翻译：

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具有时基误差抑制功能的双谐振器温度传感方法

在这项研究中，我们提出了一种新型双谐振器温度传感器，它可以嵌入其他 MEMS 传感器中，以改进热补偿和运行校准。对于准确的温度测量，所提出的方法减少了频率计数中的时基误差，消除了对高精度参考时钟的需要，并且可以在不使用校准过程的情况下消除时基老化的影响。传感器结构由应变放大梁和两个具有不同温度敏感性的双端音叉（DETF）谐振器组成。DETF 与双 PLL 电路同时保持谐振。实验表明，以降低灵敏度为代价，可以抑制长谐振器高达 0.164 °C 的测量误差和 0.164 °C 的测量误差。当使用 50 ppm 精度的时基时，短谐振器的温度为 240 °C。此外，虽然随着时基精度的降低，单个传感元件的频率稳定性特性急剧恶化，但所提出的频率比的频率稳定性不受影响，并且与两个谐振器相比，它是优越的。