We propose a new SFS (shape from shading) technique for improved 3D surface reconstruction and imaging of relatively smooth surface topography using the scanning electron microscope (SEM). The new arrangement of backscattered electrons detector plates allows decreasing the initial energy of the electron probe, which makes this SEM technique to be suitable for usage on radiation-sensitive samples like biological tissues. Experiments show high effectiveness of the method, which improves both the gradient sensitivity of the signal and the signal to noise ratio.

中文翻译：

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使用改进的背散射电子探测器在 SEM 中进行 3D 表面形貌成像：排列和重建算法

我们提出了一种新的 SFS（阴影形状）技术，用于使用扫描电子显微镜 (SEM) 改进 3D 表面重建和相对光滑表面形貌的成像。背散射电子探测器板的新排列可以降低电子探针的初始能量，这使得这种 SEM 技术适用于辐射敏感样品，如生物组织。实验表明该方法的有效性很高，既提高了信号的梯度灵敏度，又提高了信噪比。