We measured the physical lateral resolution of the electron backscatter diffraction (EBSD) technique for the case of pure magnesium and tungsten and compared these data with other values from literature. Spatial resolution, among other parameters, depends significantly on the accelerating voltage and the atomic number of the material. For the case of lighter metals, it is supposed to be lower than in the case of heavier metals for a given accelerating voltage. In the present work, lateral resolution was measured in dependence of accelerating voltage on a straight high angle grain boundary which was positioned parallel (horizontal boundary) and perpendicular (vertical boundary) to the tilt axis of the specimen. For magnesium the best lateral resolution of 240 nm was obtained at an accelerating voltage of 5 kV. The resolution dramatically worsened to values as high as 3500 nm as the voltage was increased from 15 kV to 30 kV. The aspect ratio of horizontal and vertical lateral resolution tended to 1.0 at the accelerating voltage of 5 kV and to 2.5 at the accelerating voltage of 30 kV. These values as function of accelerating voltages were compared with those obtained on the high atomic number metal tungsten. Here resolution at 5 kV was about a quarter of that of magnesium. With increasing voltage, the value almost didn't change. For all voltages the resolution aspect ratio stayed close to 1.0.

中文翻译：

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关于 EBSD 跨原子密度和加速电压的分辨率，特别关注轻金属镁

我们测量了纯镁和钨的电子背散射衍射 (EBSD) 技术的物理横向分辨率，并将这些数据与文献中的其他值进行了比较。空间分辨率以及其他参数在很大程度上取决于加速电压和材料的原子序数。对于较轻金属的情况，对于给定的加速电压，它应该低于较重金属的情况。在目前的工作中，横向分辨率的测量依赖于直线大角度晶界上的加速电压，该晶界平行于（水平边界）和垂直于（垂直边界）试样的倾斜轴。对于镁，在 5 kV 的加速电压下获得 240 nm 的最佳横向分辨率。随着电压从 15 kV 增加到 30 kV，分辨率急剧下降到高达 3500 nm 的值。水平和垂直横向分辨率的纵横比在 5 kV 加速电压下趋于 1.0，在 30 kV 加速电压下趋于 2.5。将这些作为加速电压函数的值与在高原子序数金属钨上获得的值进行比较。此处 5 kV 的分辨率约为镁分辨率的四分之一。随着电压的增加，该值几乎没有变化。对于所有电压，分辨率纵横比保持接近 1.0。将这些作为加速电压函数的值与在高原子序数金属钨上获得的值进行比较。此处 5 kV 的分辨率约为镁分辨率的四分之一。随着电压的增加，该值几乎没有变化。对于所有电压，分辨率纵横比保持接近 1.0。将这些作为加速电压函数的值与在高原子序数金属钨上获得的值进行比较。此处 5 kV 的分辨率约为镁分辨率的四分之一。随着电压的增加，该值几乎没有变化。对于所有电压，分辨率纵横比保持接近 1.0。