Ion beam induced heat damage in soft materials and biological samples is not yet well understood in Focused Ion Beam systems (FIBs). The work presented here discusses the physics behind the ion beam – sample interactions and the effects which lead to increases in sample temperature and potential heat damage. A model by which heat damage can be estimated and which allows parameters to be determined that reduce/prevent heat damage was derived from Fourier's law of heat transfer and compared to finite element simulations, numerical modelling results and experiments. The results suggests that ion beam induced heat damage can be prevented/minimised by reducing the ion beam current (local dose rate), decreasing the beam overlap (reduced local ion dose) and by introducing a blur (increased surface cross‐section area, reduced local dose) while sputtering, patterning or imaging soft material and nonresin‐embedded biological samples using FIBs.

中文翻译：

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聚焦离子束诱导样品温度升高的建模：生物样品中热损伤的案例研究

在聚焦离子束系统 (FIB) 中，软材料和生物样品中的离子束引起的热损伤尚未得到很好的理解。这里介绍的工作讨论了离子束背后的物理原理——样品相互作用以及导致样品温度升高和潜在热损伤的影响。可以估计热损伤并允许确定减少/防止热损伤的参数的模型源自傅立叶传热定律，并与有限元模拟、数值建模结果和实验进行比较。结果表明，可以通过降低离子束电流（局部剂量率）、减少离子束重叠（降低局部离子剂量）和引入模糊（增加表面横截面积，