Microelectromechanical systems (MEMS) that require contact of moving parts to implement complex functions exhibit limits to their performance and reliability. Here, we advance our particle tracking method to measure MEMS motion in operando at nanometer, microradian, and millisecond scales. We test a torsional ratcheting actuator and observe dynamic behavior ranging from nearly perfect repeatability, to transient feedback and stiction, to terminal failure. This new measurement capability will help to understand and improve MEMS motion.

中文翻译：

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微机电系统性能和可靠性的粒子跟踪

需要接触运动部件以实现复杂功能的微机电系统 (MEMS) 表现出其性能和可靠性的限制。在这里，我们改进了我们的粒子跟踪方法，以在纳米、微弧度和毫秒尺度上测量操作中的 MEMS 运动。我们测试扭转棘轮执行器并观察动态行为，从近乎完美的重复性到瞬态反馈和静摩擦，再到终端故障。这种新的测量功能将有助于了解和改进 MEMS 运动。