This review gathers together 15 special topics in modern interferometric metrology representing a sampling of historical, current and future developments. The selected topics cover a wide range of applications, including distance and displacement measurement, the testing of optical components, interference microscopy for surface structure analysis, form and dimensional measurements of industrial parts, and recent applications in semiconductor manufacturing and consumer electronics. Techniques range from laser Fizeau systems to dynamic ellipsometry using polarized heterodyne interferometry.

中文翻译：

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干涉光学计量专题综述


本综述汇集了现代干涉测量学的 15 个专题，代表了历史、当前和未来发展的样本。所选主题涵盖广泛的应用，包括距离和位移测量、光学元件测试、用于表面结构分析的干涉显微镜、工业零件的形状和尺寸测量以及半导体制造和消费电子产品中的最新应用。技术范围从激光斐索系统到使用偏振外差干涉测量法的动态椭圆测量术。