A hybrid integrated circuit (IC)/microfluidic chip is presented that independently and simultaneously traps and moves microscopic objects suspended in fluid using both electric and magnetic fields. This hybrid chip controls the location of dielectric objects, such as living cells and drops of fluid, on a 60 times 61 array of pixels that are 30 times 38 mum2 in size, each of which can be individually addressed with a 50-V peak-to-peak dc-to-10-MHz radio-frequency voltage. These high-voltage pixels produce electric fields above the chip's surface with a magnitude |oarrE| ap 1 V/ mum, resulting in strong dielectrophoresis (DEP) forces |oarrFDEP| ap 1 nN. Underneath the array of DEP pixels, there is a magnetic matrix that consists of two perpendicular sets of 60 metal wires running across the chip. Each wire can be sourced with 120 mA to trap and move magnetically susceptible objects using magnetophoresis. The DEP pixel array and magnetic matrix can be used simultaneously to apply forces to microscopic objects, such as living cells or lipid vesicles, that are tagged with magnetic nanoparticles. The capabilities of the hybrid IC/microfluidic chip demonstrated in this paper provide important building blocks for a platform for biological and chemical applications.

中文翻译：

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高压介电泳和磁泳混合集成电路/微流控芯片

提出了一种混合集成电路 (IC)/微流控芯片，它使用电场和磁场独立地同时捕获和移动悬浮在流体中的微观物体。这种混合芯片控制介电物体（例如活细胞和液滴）在 60 乘 61 像素阵列上的位置，像素阵列的尺寸为 30 乘以 38 mm2，每个像素都可以用 50 V 峰值单独寻址 -峰值直流至 10 MHz 射频电压。这些高压像素在芯片表面上方产生大小为 |oarrE| 的电场。ap 1 V/ mum，导致强介电泳 (DEP) 力 |oarrFDEP| ap 1 nN。在 DEP 像素阵列下方，有一个磁性矩阵，由两组垂直的 60 根金属线组成，这些金属线穿过芯片。每根导线都可以提供 120 mA 电流，以使用磁泳法捕获和移动易受磁影响的物体。DEP 像素阵列和磁性矩阵可以同时使用，以对用磁性纳米粒子标记的微观物体（例如活细胞或脂质囊泡）施加力。本文展示的混合 IC/微流控芯片的功能为生物和化学应用平台提供了重要的构建模块。