An accurate analytical model for the change in resistance of a piezoresistor is necessary for the design of silicon piezoresistive transducers. Ion implantation requires a high-temperature oxidation or annealing process to activate the dopant atoms, and this treatment results in a distorted dopant profile due to diffusion. Existing analytical models do not account for the concentration dependence of piezoresistance and are not accurate for nonuniform dopant profiles. We extend previous analytical work by introducing two nondimensional factors, namely, the efficiency and geometry factors. A practical benefit of this efficiency factor is that it separates the process parameters from the design parameters; thus, designers may address requirements for cantilever geometry and fabrication process independently. To facilitate the design process, we provide a lookup table for the efficiency factor over an extensive range of process conditions. The model was validated by comparing simulation results with the experimentally determined sensitivities of piezoresistive cantilevers. We performed 9200 TSUPREM4 simulations and fabricated 50 devices from six unique process flows; we systematically explored the design space relating process parameters and cantilever sensitivity. Our treatment focuses on piezoresistive cantilevers, but the analytical sensitivity model is extensible to other piezoresistive transducers such as membrane pressure sensors.

中文翻译：

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压阻式悬臂梁性能——第一部分：灵敏度分析模型

硅压阻换能器的设计需要一个精确的压敏电阻电阻变化分析模型。离子注入需要高温氧化或退火工艺来激活掺杂原子，而这种处理会由于扩散而导致掺杂分布扭曲。现有的分析模型没有考虑压阻的浓度依赖性，并且对于不均匀的掺杂剂分布不准确。我们通过引入两个无量纲因素来扩展先前的分析工作，即效率和几何因素。这个效率因素的一个实际好处是它将工艺参数与设计参数分开；因此，设计人员可以独立解决悬臂几何形状和制造工艺的要求。为了方便设计过程，我们为广泛的工艺条件范围内的效率因子提供了一个查找表。该模型通过将模拟结果与实验确定的压阻悬臂的灵敏度进行比较来验证。我们进行了 9200 次 TSUPREM4 模拟，并从六个独特的工艺流程中制造了 50 个器件；我们系统地探索了与工艺参数和悬臂灵敏度相关的设计空间。我们的处理侧重于压阻式悬臂梁，但分析灵敏度模型可扩展到其他压阻式传感器，例如薄膜压力传感器。我们进行了 9200 次 TSUPREM4 模拟，并从六个独特的工艺流程中制造了 50 个器件；我们系统地探索了与工艺参数和悬臂灵敏度相关的设计空间。我们的处理侧重于压阻式悬臂梁，但分析灵敏度模型可扩展到其他压阻式传感器，例如薄膜压力传感器。我们进行了 9200 次 TSUPREM4 模拟，并从六个独特的工艺流程中制造了 50 个器件；我们系统地探索了与工艺参数和悬臂灵敏度相关的设计空间。我们的处理侧重于压阻式悬臂梁，但分析灵敏度模型可扩展到其他压阻式传感器，例如薄膜压力传感器。