We demonstrate the application of polydimethylsiloxane (PDMS) thin films in highly sensitive pressure and oxygen sensors, designed for pressure and oxygen content measurements within the heart and blood vessels. PDMS thin film displacement as a result of pressure changes was transduced by a capacitive detection technique to produce quantitative measurement of absolute pressures. Oxygen measurements were obtained by transducing the current change between a Pt and an Ag/AgCl electrode on a glass substrate, with KCl soaked filter paper as the electrolytic media that is separated from the oxygen carrying fluid by a thin PDMS membrane. The best sensitivity for the pressure sensor was ~0.1 nA/KPa, with a noise limited resolution of ~0.09 KPa. For the oxygen sensor, the best sensitivity was ~2.75 μA for 1% change in oxygen content of the surrounding media, with a noise limited resolution of ~6.18 ppm oxygen. These experimental results agree with theoretical modeling predictions, and suggest that the semi-permeable and biocompatible PDMS can be successfully adopted as the contacting membrane in an integrated sensor design to quantify pressure and oxygen content in blood.

中文翻译：

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基于聚二甲基硅氧烷薄膜的微型植入式压力和氧传感器。

我们展示了聚二甲基硅氧烷 (PDMS) 薄膜在高灵敏度压力和氧传感器中的应用，该传感器专为心脏和血管内的压力和氧含量测量而设计。由于压力变化而导致的 PDMS 薄膜位移通过电容检测技术进行转换，以产生绝对压力的定量测量。氧气测量是通过在玻璃基板上转换 Pt 和 Ag/AgCl 电极之间的电流变化来获得的，用 KCl 浸泡的滤纸作为电解介质，通过薄的 PDMS 膜与载氧流体隔开。压力传感器的最佳灵敏度为 ~0.1 nA/KPa，噪声限制分辨率为 ~0.09 KPa。对于氧传感器，最佳灵敏度为~2。周围介质氧含量变化 1% 时为 75 μA，噪声限制分辨率约为 6.18 ppm 氧。这些实验结果与理论模型预测一致，并表明半透性和生物相容性 PDMS 可以成功地用作集成传感器设计中的接触膜，以量化血液中的压力和氧含量。