This paper presents a planar waveguide grating sensor integrated with a photodetector (PD) for on-chip optical sensing systems which are suitable for diagnostics in the field and in-situ measurements. III-V semiconductor-based thin-film PD is integrated with a polymer based waveguide grating device on a silicon platform. The fabricated optical sensor successfully discriminates optical spectral characteristics of the polymer waveguide grating from the on-chip PD. In addition, its potential use as a refractive index sensor is demonstrated. Based on a planar waveguide structure, the demonstrated sensor chip may incorporate multiple grating waveguide sensing regions with their own optical detection PDs. In addition, the demonstrated processing is based on a post-integration process which is compatible with silicon complementary metal-oxide semiconductor (CMOS) electronics. Potentially, this leads a compact, chip-scale optical sensing system which can monitor multiple physical parameters simultaneously without need for external signal processing.

中文翻译：

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与薄膜光电探测器集成的聚合物波导光栅传感器

本文介绍了一种集成有光电探测器 (PD) 的平面波导光栅传感器，用于片上光学传感系统，适用于现场诊断和原位测量。基于 III-V 半导体的薄膜 PD 与基于聚合物的波导光栅器件集成在硅平台上。制造的光学传感器成功地将聚合物波导光栅的光谱特性与片上 PD 区分开来。此外，还展示了其作为折射率传感器的潜在用途。基于平面波导结构，所展示的传感器芯片可以将多个光栅波导传感区域与它们自己的光学检测 PD 结合起来。此外，所演示的工艺基于与硅互补金属氧化物半导体 (CMOS) 电子器件兼容的后集成工艺。这可能会导致一个紧凑的芯片级光学传感系统，该系统可以同时监测多个物理参数，而无需外部信号处理。