Our research team has developed a 2D micro image display device that can potentially overcome the size reduction limits while maintaining the high-image resolution and field of view obtained by mirror-based display systems. The basic design of the optical scanner includes a microfabricated SU-8 cantilever waveguide that is electromechanically deflected by a piezoelectric actuator. From the distal tip of the cantilever waveguide, a light beam is emitted and the direction of propagation is displaced along two orthogonal directions. The waveforms for the actuator and the LED light modulation are generated and controlled using a field programmable gate array. Our recent study is an update to the previously-reported mechanical scanner, replacing the hand-built PZT scanner and fiber waveguide with a microfabricated system incorporating aerosol-deposited PZT thin film and a polymeric SU-8 wave guide. In this article, we report on the design and fabrication of a prototype miniaturized 2D scanner, discuss optical and mechanical the modeling of the system's properties and present the experimental results.

中文翻译：

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使用集成微谐振波导扫描系统开发 2D 微显示器

我们的研究团队开发了一种 2D 微图像显示设备，它可以潜在地克服尺寸减小的限制，同时保持基于镜子的显示系统获得的高图像分辨率和视野。光学扫描仪的基本设计包括一个微制造的 SU-8 悬臂波导，它由压电致动器机电偏转。从悬臂波导的远端发出一束光束，传播方向沿两个正交方向发生位移。致动器和 LED 光调制的波形是使用现场可编程门阵列生成和控制的。我们最近的研究是对先前报道的机械扫描仪的更新，用包含气溶胶沉积 PZT 薄膜和聚合物 SU-8 波导的微制造系统代替手工制作的 PZT 扫描仪和光纤波导。在本文中，我们报告了原型小型化 2D 扫描仪的设计和制造，讨论了系统特性的光学和机械建模，并展示了实验结果。