In this paper, high-quality nanocrystalline SnO2 thin film was grown on bare Si (100) substrates by a sol-gel method. A metal-semiconductor-metal gas sensor was fabricated using nanocrystalline SnO2 thin film and palladium (Pd) metal. The contact between Pd and nanocrystalline SnO2 film is tunable. Ohmic barrier contact was formed without addition of glycerin, while Schottky contact formed by adding glycerin. Two kinds of sensor devices with Schottky contact were fabricated (Device 1: 8 h, 500 °C; Device 2: 10 h, 400 °C). The room temperature sensitivity for hydrogen (H2) was 120 and 95 % in 1000 ppm H2, and the low power consumption was 65 and 86 µW for two devices, respectively. At higher temperature of 125 °C, the sensitivity was increased to 195 and 160 %, respectively. The sensing measurements were repeatable at various temperatures (room temperature, 75, 125 °C) for over 50 min. It was found that Device 1 has better sensitivity than Device 2 due to its better crystallinity. These findings indicate that the sensors fabricated on bare Si by adding glycerin to the sol solution have strong ability to detect H2 gas under different concentrations and temperatures.

中文翻译：

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基于在裸硅衬底上生长的纳米晶SnO2薄膜的氢气传感器。

本文通过溶胶-凝胶法在裸露的Si（100）衬底上生长高质量的纳米SnO2薄膜。使用纳米晶SnO2薄膜和钯（Pd）金属制造了金属-半导体-金属气体传感器。Pd和纳米晶SnO2膜之间的接触是可调的。在不添加甘油的情况下形成了欧姆势垒接触，而在添加甘油的情况下形成了肖特基接触。制造了两种具有肖特基接触的传感器设备（设备1：8 h，500°C；设备2：10 h，400°C）。在1000 ppm H2中，氢气（H2）的室温灵敏度为120％和95％，两个器件的低功耗分别为65和86 µW。在125°C的较高温度下，灵敏度分别提高到195和160％。传感测量在各种温度（室温，75、125°C）下可重复50分钟以上。发现设备1由于其更好的结晶度而具有比设备2更好的灵敏度。这些发现表明，通过在溶胶溶液中添加甘油而在裸露的Si上制造的传感器具有很强的检测不同浓度和温度下的H2气体的能力。