This paper describes the use of different conducting polymers (polyaniline, poly(o-ethoxyaniline), and polypyrrole) as a sensitive layer on a silicon cantilever sensor. The mechanical response (deflection) of the bimaterial (the coated cantilever) was investigated under the influence of relative humidity. The variations in the deflection of the coated cantilevers when exposed to relative humidity were evaluated. The results indicated a linear sensitivity in ranges, where the high value was obtained for a polypyrrole-sensitive layer between 20 and 45% of humidity. Furthermore, the sensor shows excellent performance along with rapid response and recovery times, relatively low hysteresis, and excellent stability. The sensors developed are potentially excellent materials for sensing low humidity for long time.

中文翻译：

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用于检测湿度的导电聚合物悬臂传感器


本文描述了使用不同的导电聚合物（聚苯胺、聚邻乙氧基苯胺和聚吡咯）作为硅悬臂梁传感器上的敏感层。在相对湿度的影响下研究了双材料（涂层悬臂）的机械响应（偏转）。评估了暴露在相对湿度下时涂层悬臂梁的偏转变化。结果表明，在一定范围内具有线性灵敏度，其中聚吡咯敏感层在 20% 至 45% 湿度之间获得高值。此外，该传感器还表现出优异的性能，以及快速响应和恢复时间、相对较低的滞后性和出色的稳定性。所开发的传感器是长期感测低湿度的潜在优秀材料。