We present measurements of focal spot size and brightness in a focused ion beam system utilizing a laser-cooled atomic beam source of Cs ions. Spot sizes as small as (2.1 ± 0.2) nm (one standard deviation) and reduced brightness values as high as (2.4 ± 0.1) × 107 A m-2 Sr-1 eV-1 are observed with a 10 keV beam. This measured brightness is over 24 times higher than the highest brightness observed in a Ga liquid metal ion source. The behavior of brightness as a function of beam current and the dependence of effective source temperature on ionization energy are examined. The performance is seen to be consistent with earlier predictions. Demonstration of this source with very high brightness, producing a heavy ionic species such as Cs+, promises to allow significant improvements in resolution and throughput for such applications as next-generation circuit edit and nanoscale secondary ion mass spectrometry.

中文翻译：

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来自冷原子束离子源的高亮度Cs聚焦离子束。

我们介绍了利用激光冷却的Cs离子原子束源的聚焦离子束系统中焦点尺寸和亮度的测量结果。用10 keV光束观察到的光斑尺寸小（2.1±0.2）nm（一个标准偏差），降低的亮度值高达（2.4±0.1）×107 A m-2 Sr-1 eV-1。该测量的亮度是在Ga液态金属离子源中观察到的最高亮度的24倍以上。检查了作为束流函数的亮度行为以及有效源温度对电离能的依赖性。该性能被认为与早期的预测是一致的。该光源具有很高的亮度，可产生重离子，例如Cs +，