We develop superconducting transition-edge sensor (TES) microcalorimeter focal planes for versatility in meeting the specifications of X-ray imaging spectrometers, including high count rate, high energy resolution, and large field of view. In particular, a focal plane composed of two subarrays: one of fine pitch, high count-rate devices and the other of slower, larger pixels with similar energy resolution, offers promise for the next generation of astrophysics instruments, such as the X-ray Integral Field Unit Instrument on the European Space Agency's ATHENA mission. We have based the subarrays of our current design on successful pixel designs that have been demonstrated separately. Pixels with an all-gold X-ray absorber on 50 and 75 μm pitch, where the Mo/Au TES sits atop a thick metal heatsinking layer, have shown high resolution and can accommodate high count rates. The demonstrated larger pixels use a silicon nitride membrane for thermal isolation, thinner Au, and an added bismuth layer in a 250-μm2 absorber. To tune the parameters of each subarray requires merging the fabrication processes of the two detector types. We present the fabrication process for dual production of different X-ray absorbers on the same substrate, thick Au on the small pixels and thinner Au with a Bi capping layer on the larger pixels to tune their heat capacities. The process requires multiple electroplating and etching steps, but the absorbers are defined in a single-ion milling step. We demonstrate methods for integrating the heatsinking of the two types of pixel into the same focal plane consistent with the requirements for each subarray, including the limiting of thermal crosstalk. We also discuss fabrication process modifications for tuning the intrinsic transition temperature ($T_{c}$) of the bilayers for the different device types through variation of the bilayer thicknesses. The latest results on these “hybrid” arrays will be presented.

中文翻译：

---

由两种不同像素类型组成的 X 射线微量热计焦平面的制作

我们开发了超导过渡边缘传感器 (TES) 微量热仪焦平面，具有多功能性，可满足 X 射线成像光谱仪的规格，包括高计数率、高能量分辨率和大视场。特别是，由两个子阵列组成的焦平面：一个是细间距、高计数率的设备，另一个是具有相似能量分辨率的较慢、较大的像素，为下一代天体物理学仪器（如 X 射线）提供了希望欧洲航天局 ATHENA 任务中的整体现场装置仪器。我们将当前设计的子阵列基于已单独演示的成功像素设计。具有 50 和 75 μm 间距的全金 X 射线吸收器的像素，其中 Mo/Au TES 位于厚金属散热层的顶部，已经显示出高分辨率并且可以适应高计数率。所展示的较大像素使用氮化硅膜进行热隔离、较薄的 Au 以及在 250-μm2 吸收器中添加的铋层。要调整每个子阵列的参数，需要合并两种探测器类型的制造过程。我们展示了在同一基板上双重生产不同 X 射线吸收器的制造过程，小像素上的厚金和大像素上的薄金和铋覆盖层，以调整它们的热容量。该过程需要多个电镀和蚀刻步骤，但吸收体是在单离子铣削步骤中定义的。我们展示了将两种类型的像素的散热集成到与每个子阵列的要求一致的同一焦平面中的方法，包括限制热串扰。我们还讨论了通过改变双层厚度来调整不同器件类型的双层的本征转变温度 ($T_{c}$) 的制造工艺修改。将介绍这些“混合”阵列的最新结果。