We develop an automatic and objective method to measure and correct residual aberrations in atomic-resolution HRTEM complex exit waves for crystalline samples aligned along a low-index zone axis. Our method uses the approximate rotational point symmetry of a column of atoms or single atom to iteratively calculate a best-fit numerical phase plate for this symmetry condition, and does not require information about the sample thickness or precise structure. We apply our method to two experimental focal series reconstructions, imaging a β-Si3N4 wedge with O and N doping, and a single-layer graphene grain boundary. We use peak and lattice fitting to evaluate the precision of the corrected exit waves. We also apply our method to the exit wave of a Si wedge retrieved by off-axis electron holography. In all cases, the software correction of the residual aberration function improves the accuracy of the measured exit waves.

中文翻译：

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晶体样品的重建HRTEM出射波中的剩余像差的自动软件校正。

我们开发了一种自动客观的方法来测量和校正原子分辨率HRTEM复杂出射波中沿低折射率区域轴对齐的晶体样品的残留像差。我们的方法使用一列原子或单个原子的近似旋转点对称性来迭代计算针对此对称条件的最佳拟合数字相位板，并且不需要有关样品厚度或精确结构的信息。我们将我们的方法应用于两个实验焦点系列重建，成像带有O和N掺杂的β-Si3N4楔形物，以及单层石墨烯晶界。我们使用峰和晶格拟合来评估校正后的出射波的精度。我们还将我们的方法应用于通过离轴电子全息图检索的硅楔的出射波。在所有情况下，