We describe a method for fabricating an aperture on a fluidic cantilever device using SU-8 as a structural material. The device can ultimately be used for patch clamping, microinjections, fluidic delivery, fluidic deposition, and micromaterial removal. In the first generation of this device, the initial aperture diameter is 10 μm and is fabricated on a silicon-on-insulator (SOI) wafer that is structurally used to define the aperture. The aperture can be reduced in size through mask design. This self-aligned process allows for patterning on the sharp tip projecting out of the fluidic plane on the cantilever and is batch fabricated, reducing the cost and time for manufacture. The initial mask, SOI device layer thickness, and the width of the base of the tip define the size of the aperture. The SU-8 micromachined cantilever includes an electrode and a force sensing mechanism. The cantilever can be easily integrated with an atomic force microscope or an optical microscope.

中文翻译：

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SU-8微悬臂带有孔，流体通道以及用于生物学和其他应用的传感机制。

我们描述了一种使用SU-8作为结构材料在流体悬臂装置上制造孔的方法。该设备最终可用于膜片夹持，微注射，流体输送，流体沉积和微材料去除。在此设备的第一代产品中，初始孔径为10μm，并在绝缘体上覆硅（SOI）晶圆上制造，该晶圆在结构上用于定义孔径。通过掩模设计可以减小孔的尺寸。这种自对准的过程允许在尖锐的尖端上进行构图，该尖端从悬臂的流体平面伸出，并且是分批制造的，从而降低了制造成本和时间。初始掩模，SOI器件层的厚度以及尖端底部的宽度决定了孔径的大小。SU-8微机械悬臂包括一个电极和一个力感应机构。悬臂可以容易地与原子力显微镜或光学显微镜集成。