A thin-film piezoelectric microactuator using a novel combination of active vertical translational scanning and passive resonant rotational scanning is presented. Thin-film lead-zirconate-titanate unimorph bending beams surrounding a central platform provide nearly 200-μm displacement at 18 V with bandwidth greater than 200 Hz. Inside the platform, a mirror mount, or mirror surface, supported by silicon dioxide spring beams can be excited to resonance by low-voltage; high-frequency excitation of the outer PZT beams. Over ±5.5° mechanical resonance is obtained at 3.8 kHz and ±2 V. The combination of large translational vertical displacements and high-speed rotational scanning is intended to support real-time cross-sectional imaging in a dual axes confocal endomicroscope.

中文翻译：

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具有高速旋转扫描的大行程垂直 PZT 微致动器

提出了使用主动垂直平移扫描和被动共振旋转扫描的新型组合的薄膜压电微致动器。围绕中心平台的薄膜锆钛酸铅单晶弯曲梁在 18 V 电压下提供近 200 μm 的位移，带宽大于 200 Hz。在平台内部，由二氧化硅弹簧梁支撑的镜座或镜面可以通过低压激发共振；外部 PZT 光束的高频激励。在 3.8 kHz 和 ±2 V 下获得超过 ±5.5° 的机械共振。大平移垂直位移和高速旋转扫描的组合旨在支持双轴共聚焦内窥镜中的实时横截面成像。