In this paper, we demonstrate an elastomeric polymer resonant waveguide grating structure to be used as a pressure sensor. The applied pressure is measured by optical resonance spectrum peak shift. The sensitivity - as high as 86.74pm/psi or 12.58pm/kPa - has been experimentally obtained from a fabricated sensor. Potentially, the sensitivity of the demonstrated sensor can be tuned to different pressure ranges by the choices of elastic properties and layer thicknesses of the waveguide and cladding layers. The simulation results agree well with experimental results and indicate that the dominant effect on the sensor is the change of grating period when external pressure is applied. Based on the two-dimensional planar structure, the demonstrated sensor can be used to measure applied surface pressure optically, which has potential applications for optical ultrasound imaging and pressure wave detection/mapping.

中文翻译：

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基于弹性聚合物谐振波导光栅的压力传感器

在本文中，我们展示了一种用作压力传感器的弹性聚合物谐振波导光栅结构。施加的压力是通过光学共振光谱峰位移来测量的。灵敏度 - 高达 86.74pm/psi 或 12.58pm/kPa - 已通过实验从制造的传感器中获得。潜在地，所演示的传感器的灵敏度可以通过选择弹性特性和波导和包层的层厚度来调整到不同的压力范围。仿真结果与实验结果吻合较好，表明当施加外部压力时，对传感器的主要影响是光栅周期的变化。基于二维平面结构，所展示的传感器可用于光学测量施加的表面压力，