Two different confocal micro X-ray fluorescence spectrometers have been developed and installed at Osaka City University and the Vienna University of Technology Atominstitut. The Osaka City University system is a high resolution spectrometer operating in air. The Vienna University of Technology Atominstitut spectrometer has a lower spatial resolution but is optimized for light element detection and operates under vacuum condition. The performance of both spectrometers was compared. In order to characterize the spatial resolution, a set of nine specially prepared single element thin film reference samples (500 nm in thickness, Al, Ti, Cr, Fe Ni, Cu, Zr, Mo, and Au) was used. Lower limits of detection were determined using the National Institute of Standards and Technology standard reference material glass standard 1412. A paint layer sample (cultural heritage application) and paint on automotive steel samples were analyzed with both instruments. The depth profile information was acquired by scanning the sample perpendicular to the surface. © 2013 The Authors. X-Ray Spectrometry published by John Wiley & Sons, Ltd.

中文翻译：

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两种不同设计方面的共焦微型 XRF 光谱仪的比较

大阪市立大学和维也纳工业大学原子研究所已开发并安装了两种不同的共焦微型 X 射线荧光光谱仪。大阪市立大学系统是一种在空气中运行的高分辨率光谱仪。维也纳科技大学原子研究所光谱仪的空间分辨率较低，但针对轻元素检测进行了优化，并在真空条件下运行。比较了两种光谱仪的性能。为了表征空间分辨率，使用了一组九个专门制备的单元素薄膜参考样品（厚度为 500 nm，Al、Ti、Cr、Fe、Ni、Cu、Zr、Mo 和 Au）。使用美国国家标准技术研究院标准参考材料玻璃标准 1412 确定检测下限。使用两台仪器对油漆层样品（文化遗产应用）和汽车钢样品上的油漆进行了分析。通过垂直于表面扫描样品来获取深度剖面信息。© 2013 作者。X 射线光谱测定法由 John Wiley & Sons, Ltd. 出版