Abstract In this study, the microstructures and properties of amorphous, polycrystalline, and Mn+1AXn (MAX)-phase Ti–Al–N thin films deposited from an MAX-phase Ti2AlN target by magnetron sputtering were studied. The phase structures of the films were altered by varying the deposition parameters and cathode power supply. The effects of the different phase structures on the mechanical, tribological, and nanowear properties of the Ti–Al–N films were systematically investigated. Compared to those of the amorphous and polycrystalline Ti–Al–N thin films, the MAX-phase Ti2AlN film exhibited higher hardness and toughness owing to its unique nanolaminated structure. In addition, the MAX-phase film exhibited a better wear resistance in ball-on-disk and nanowear tests, than those of the other two phases owing to its higher toughness, hardness, and H/E values.

中文翻译：

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由 M+1AX 相 Ti2AlN 复合靶合成的非晶、多晶和 M+1AX 相 Ti-Al-N 薄膜的微观结构和性能

摘要 在这项研究中，研究了从 MAX 相 Ti2AlN 靶材通过磁控溅射沉积的非晶、多晶和 Mn+1AXn (MAX) 相 Ti-Al-N 薄膜的微观结构和性能。通过改变沉积参数和阴极电源来改变薄膜的相结构。系统地研究了不同相结构对 Ti-Al-N 薄膜机械、摩擦和纳米磨损性能的影响。与非晶和多晶 Ti-Al-N 薄膜相比，MAX 相 Ti2AlN 薄膜由于其独特的纳米层压结构而表现出更高的硬度和韧性。此外，MAX相薄膜在球盘和纳米磨损试验中表现出比其他两相更好的耐磨性，因为它具有更高的韧性、硬度、