Combinatorial Material Science and Strain Engineering Enabled by Pulsed Laser Deposition Using Radially Segmented Targets,ACS Combinatorial Science

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Combinatorial Material Science and Strain Engineering Enabled by Pulsed Laser Deposition Using Radially Segmented Targets
ACS Combinatorial Science Pub Date : 2018-10-11 00:00:00 , DOI: 10.1021/acscombsci.8b00100
Max Kneiß ₁ , Philipp Storm ₁ , Gabriele Benndorf ₁ , Marius Grundmann ₁ , Holger von Wenckstern ₁

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Vertical composition gradients of ternary alloy thin films find applications in numerous device structures. Up to now such gradients along the growth direction have not been realized by standard pulsed laser deposition (PLD) systems. In this study, we propose an approach based on a single elliptically segmented PLD target suited for the epitaxial growth of vertically graded layers. The composition of the thin films can be varied by a simple adjustment of the position of the PLD laser spot on the target surface. We demonstrate this principle for the Mg_xZn_1–xO alloy system. Such vertically composition-graded Mg_xZn_1–xO thin films exhibit high optical quality and a well-defined Mg-content for each layer. No signs of interdiffusion of Mg-atoms between the layers have been found. Further, this method is capable to deposit homogeneous thin films with any desired, well-defined cation composition having the same high optical and structural quality as films grown by conventional PLD.

中文翻译：

通过使用径向分段目标的脉冲激光沉积实现组合材料科学和应变工程

三元合金薄膜的垂直组成梯度在许多器件结构中得到应用。到目前为止，尚未通过标准脉冲激光沉积（PLD）系统实现沿生长方向的这种梯度。在这项研究中，我们提出了一种基于单个椭圆分段的PLD目标的方法，该目标适用于垂直渐变层的外延生长。可以通过简单调整目标表面上PLD激光光斑的位置来改变薄膜的成分。我们证明了Mg _x Zn _{1– x} O合金系统的这一原理。这种垂直组成分级的Mg _x Zn _{1– x}O薄膜显示出很高的光学质量，并且每一层的Mg含量均明确。尚未发现各层之间的Mg原子相互扩散的迹象。此外，该方法能够沉积具有任何期望的，定义明确的阳离子组成的均质薄膜，该阳离子组成具有与通过常规PLD生长的膜相同的高光学和结构质量。

更新日期：2018-10-11

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