Metal oxides are an important class of materials for optoelectronic applications. In this context, developing simple and versatile processes for integrating these materials at the microscale and nanoscale has become increasingly important. One of the major remaining challenges is to control the microstructuration and electro‐optical properties in a single step. It is shown here that near‐infrared femtosecond laser irradiation can be successfully used to prepare amorphous or crystallized TiO₂ microstructures in a single step using a direct laser writing (DLW) approach from a TiO₂ precursor thin film doped with a suitable dye. When laser writing is conducted under a nitrogen atmosphere, simultaneous to the crosslinking of the Ti‐oxide precursor, the graphitization of the organic species embedded in the initial film is observed. In this case, a carbon network is generated within the TiO₂ matrix, which significantly increases the conductivity. Moreover, the TiO₂/C nanocomposite exhibits piezoresistive behavior that is used in a pressure sensor device. Using this route, it is possible to use DLW to fabricate microsized pressure sensors.

中文翻译：

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具有可调导电性能的结晶TiO2和TiO2 /碳微结构的直接激光写入

金属氧化物是用于光电应用的重要材料类别。在这种情况下，开发用于在微米级和纳米级集成这些材料的简单而通用的方法变得越来越重要。剩下的主要挑战之一是要一步控制微结构和电光性能。在此表明，近红外飞秒激光照射可成功地用于制备无定形的或结晶的TiO _2个在单个步骤中使用激光直写（DLW）的方式从一个微结构的TiO ₂掺杂有合适染料的前驱体薄膜。在氮气氛下进行激光刻写时，与钛氧化物前体交联的同时，观察到嵌入初始膜中的有机物的石墨化。在这种情况下，在TiO ₂基体内产生了碳网络，这大大提高了电导率。而且，TiO ₂ / C纳米复合材料表现出在压力传感器装置中使用的压阻性能。使用此方法，可以使用DLW来制造微型压力传感器。