Abstract Aluminium doped ZnO (AZO) thin films have been synthesized by using a sol-gel spin coating method. The effect of Al-doping on physicochemical and NO2 sensing properties of the AZO thin films were studied. The structural and compositional analysis confirms the phase formation of ZnO and substitution of aluminium atoms into zinc oxide lattice. The gas sensing performance of AZO thin films investigated at different operational temperatures towards NO2 gas. The NO2 sensing study reveals that the 2 at% AZO film sensor shows excellent gas sensing characteristics at 200 °C.

中文翻译：

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溶胶-凝胶衍生的铝掺杂氧化锌薄膜：铝掺杂对物理化学和 NO2 传感特性的影响

摘要 采用溶胶-凝胶旋涂法合成了铝掺杂的氧化锌（AZO）薄膜。研究了 Al 掺杂对 AZO 薄膜的物理化学和 NO2 传感性能的影响。结构和成分分析证实了 ZnO 的相形成和铝原子取代氧化锌晶格。AZO 薄膜在不同操作温度下对 NO2 气体的气敏性能进行了研究。NO2 传感研究表明，2 at% AZO 薄膜传感器在 200 °C 下显示出出色的气体传感特性。