Superconformal Au deposition is demonstrated in a Na3Au(SO3)2 + Na2SO3 electrolyte using Bi species to catalyze the reduction of Au(SO3)23−. Micromolar additions of Bi3+ to the sulfite-based electrolyte accelerate the reduction of Au(SO3)23− as shown by hysteretic voltammetry and rising chronoamperometric transients. Superconformal feature filling is observed over a defined range of Bi3+ concentration, potential and hydrodynamics. Over a more limited parameter range, approximately −0.9 V to −0.95 V, void-free, bottom-up filling of Damascene trenches is achieved. Furthermore, in the presence of significant convection the bottom-up filling is accompanied by passivation of the free surface. Bottom-up feature filling is characterized by a counterintuitive dependence of the free surface reactivity on the available flux of the Bi3+ accelerator species suggestive of an unusual coupling between hydrodynamic transport, shear and interfacial chemistry.

中文翻译：

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用亚硫酸盐电解质中的金自下而上填充大马士革沟槽

在 Na3Au(SO3)2 + Na2SO3 电解质中使用 Bi 物质催化 Au(SO3)23- 的还原，证明了超共形 Au 沉积。微摩尔量的 Bi3+ 添加到亚硫酸盐基电解质中会加速 Au(SO3)23- 的还原，如迟滞伏安法和计时电流瞬变上升所示。在定义的 Bi3+ 浓度、电位和流体动力学范围内观察到超共形特征填充。在更有限的参数范围内，大约 -0.9 V 至 -0.95 V，实现了大马士革沟槽的无空隙、自下而上的填充。此外，在存在显着对流的情况下，自下而上的填充伴随着自由表面的钝化。