Abstract Frequency selective surfaces (FSSs) with periodic smart structures have widespread applications in many areas, especially in electromagnetic wave filters. In this paper, a rapid and high-performance processing technology for large-area FSSs was presented. This novel technology combined laser direct writing lithography (LDWL) with wet chemical etching (WCE) (i.e., LDWL + WCE). Basing on experiments and in the condition of optimal parameters (i.e., 40 mW laser power, 1000 mm/s scan speed, single scan, 20 μm hatch space, pattern-profile scan path, and ferric chloride aqueous solution as etchant) of LDWL + WCE, a large-area (200 × 200 mm2) aperture type FSS with 625 square-loop units was fabricated within 8 min on a FR-4 copper-clad plate (with 12 μm-thickness copper layer). When the same FSS was prepared by commonly-used laser direct ablation (LDA) technology with itself optimal processing parameters, it needed about 62 min (nearly 8 times as much time as the former). Scanning electron microscopy (SEM) and surface probe profilometry analyses showed that the edges of the square-loop patterns fabricated by LDWL + WCE were steeper and smoother, and the FR-4 substrate had no damage. In an anechoic chamber, the electromagnetic wave filtering performances of the as-prepared FSSs were tested, and the results indicated that the FSS fabricated by LDWL + WCE had a bandpass response at 7.08 GHz with a transmittance of 97.75%. Its frequency response curve was in better agreement with the simulation result. The technology of LDWL + WCE also has the potential to rapidly fabricate large-area and/or non-planar FSSs with high performance.

中文翻译：

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大面积选频表面的快速高性能加工技术

摘要 具有周期性智能结构的频率选择表面（FSSs）在许多领域有着广泛的应用，特别是在电磁波滤波器中。在本文中，提出了一种用于大面积 FSS 的快速、高性能处理技术。这种新技术将激光直写光刻 (LDWL) 与湿法化学蚀刻 (WCE)（即 LDWL + WCE）相结合。基于实验，在LDWL+最佳参数（即40 mW激光功率、1000 mm/s扫描速度、单次扫描、20 μm孵化空间、图案轮廓扫描路径和氯化铁水溶液作为蚀刻剂）条件下WCE，在 8 分钟内在 FR-4 覆铜板（具有 12 μm 厚的铜层）上制造了具有 625 个方环单元的大面积（200 × 200 mm2）孔径型 FSS。当采用常用的激光直接烧蚀 (LDA) 技术以自身最优的工艺参数制备相同的 FSS 时，大约需要 62 分钟（几乎是前者的 8 倍）。扫描电子显微镜 (SEM) 和表面探针轮廓分析表明，LDWL + WCE 制造的方环图案边缘更陡峭、更光滑，FR-4 基板没有损坏。在消声室中，对所制备的FSSs的电磁波滤波性能进行了测试，结果表明LDWL+WCE制备的FSS在7.08 GHz处具有带通响应，透射率为97.75%。其频响曲线与仿真结果较为吻合。