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A Highly Sensitive Force Sensor with Fast Response Based on Interlocked Arrays of Indium Tin Oxide Nanosprings toward Human Tactile Perception
Advanced Functional Materials ( IF 18.5 ) Pub Date : 2018-08-30 , DOI: 10.1002/adfm.201804132
Sungwoo Chun 1 , Il Yong Choi 2 , Wonkyeong Son 1 , Gi Yoon Bae 1 , Eun Jae Lee 2 , Hyunah Kwon 2 , Jaimyun Jung 2 , Hyoung Seop Kim 2 , Jong Kyu Kim 2 , Wanjun Park 1
Affiliation  

Development of a sensor for recognizing tactile feeling is essential for realizing artificial systems that can perform human tactile functions for various applications. For achieving the capability of human tactile sensation, highly sensitive responses are required not only to static pressures but also to dynamic high‐frequency vibrations. Here, a highly sensitive force sensor based on interlocked arrays of vertically aligned indium tin oxide (ITO) nanospring structures fabricated on a flexible polyethylene naphthalate substrate is presented. The combination of rigid ITO on the flexible substrate, its unique nanoscale spring‐like geometry, and the interlocking configuration results in sensitive responses to both static and dynamic pressures with a sub‐millisecond response time over wide pressure and frequency ranges appropriate for human tactile perception. Consequently, the sensor is capable of classifying eight fabrics possessing complex patterns with 99.8% accuracy. In addition, a flexible 14 × 14 force sensor matrix array is demonstrated, thus demonstrating the integration capability.

中文翻译:

基于对人类触觉感知的铟锡氧化物纳米弹簧互锁阵列的快速响应的高灵敏力传感器。

开发用于识别触觉的传感器对于实现可以为各种应用执行人类触觉功能的人造系统至关重要。为了获得人类的触感,不仅需要对静态压力而且还需要对动态高频振动做出高度敏感的响应。在此,提出了一种高灵敏度的力传感器,该传感器基于在柔性聚萘二甲酸乙二醇酯基板上制造的垂直排列的铟锡氧化物(ITO)纳米弹簧结构的互锁阵列。柔性基板上的刚性ITO,其独特的纳米级类似于弹簧的几何形状,互锁的配置可对静态和动态压力做出灵敏的响应,在很宽的压力范围和适用于人类触觉的频率范围内,亚毫秒级的响应时间。因此,该传感器能够以99.8%的精度对具有复杂花样的八种织物进行分类。此外,还演示了一种灵活的14×14力传感器矩阵阵列,从而展示了集成能力。
更新日期:2018-08-30
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