Abstract Taking Al as top electrode, a repairing layer with ultrahigh dielectric strength and resistivity was generated at the interface between sol-gel Al2O3 films and electrodes under the applied electric field. This repairing layer effectively restored the defects on the film surface and improved the dielectric strength. More importantly, it was found that adding ZrO2 nanoparticle into the matrix film could further enhance the dielectric strength, since the ZrO2 nanoparticle is conductive to forming the interfacial repairing layer. The analysis of ac conduction properties showed that the introduction of nano-ZrO2 resulted in a lower potential barrier and a longer hopping distance for ionic migration. In addition, the simulation result indicated that nano-ZrO2 addition induced a local region of high electric field that accelerated ionic migration. As a result of the two factors, the nanocomposite structure of Al2O3/nano-ZrO2 is capable to provide more ions for the formation of interfacial repairing layer. With the stronger repairing behavior, Al2O3/nano-ZrO2 composite films exhibited significantly enhanced breakdown strength of ~ 576 MV/m and energy density of 14.7 J/cm3, in contrast with 385 MV/m and 5.9 J/cm3 for pure Al2O3 films with Al electrodes.

中文翻译：

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通过增强界面修复行为提高 Al2O3/纳米 ZrO2 复合薄膜的击穿强度和能量密度

摘要 以Al为顶电极，在外加电场作用下，在溶胶-凝胶Al2O3薄膜与电极的界面处生成具有超高介电强度和电阻率的修复层。该修复层有效地修复了薄膜表面的缺陷，提高了介电强度。更重要的是，发现在基膜中加入ZrO2纳米颗粒可以进一步提高介电强度，因为ZrO2纳米颗粒有利于形成界面修复层。交流传导特性分析表明，纳米ZrO2的引入导致较低的势垒和较长的离子迁移跳跃距离。此外，模拟结果表明，纳米ZrO2 的添加诱导了局部区域的高电场，加速了离子迁移。由于这两个因素，Al2O3/nano-ZrO2的纳米复合结构能够为界面修复层的形成提供更多的离子。随着更强的修复行为，Al2O3/纳米-ZrO2复合薄膜表现出显着增强的~576 MV/m和14.7 J/cm3的能量密度，相比之下，纯Al2O3薄膜的385 MV/m和5.9 J/cm3铝电极。