Abstract This paper presents a kind of passive wireless pressure and temperature integrated inductor-capacitor (LC) resonant sensor based on low temperature co-fired ceramic (LTCC) technology. The pressure sensing part is dependent on a traditional cavity capacitor. The temperature sensing part is composed of an interdigital capacitor and a planar spiral inductor. The capacitance and the resistance of inductor coil would change as a response to temperature. The LTCC material with a low Young's modulus of ~65 GPa prepared by our laboratory was used to obtain high pressure sensitivity. The experimental results showed that the prepared sensor has a pressure sensitivity of 1.16 kHz/kPa, and a temperature sensitivity of 0.062% dB/°C within the range of 140–850 kPa, 50–500 °C, respectively.

中文翻译：

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基于LTCC技术的集成无源无线压力温度双参数传感器

摘要 本文提出了一种基于低温共烧陶瓷（LTCC）技术的无源无线压力和温度集成电感电容（LC）谐振传感器。压力传感部分依赖于传统的腔体电容器。感温部分由叉指电容和平面螺旋电感组成。电感线圈的电容和电阻会随着温度的变化而变化。我们实验室制备的具有~65 GPa 低杨氏模量的 LTCC 材料用于获得高压力灵敏度。实验结果表明，所制备的传感器在140-850 kPa、50-500°C范围内的压力灵敏度为1.16 kHz/kPa，温度灵敏度为0.062% dB/°C。