Abstract Multilayered design showed itself to advantage for improvement of functional nitride coatings, which are widely required in various industry applications. This article reports on deposition and detailed characterization series of combined nano-multilayered coatings based on (TiAlSiY)N with changes in components of alternating binary layers. Vacuum-arc deposited (TiAlSiY)N/MoN, (TiAlSiY)N/CrN and (TiAlSiY)N/ZrN coatings were analyzed by means of various experimental techniques such as SEM with EDS, XRD and GIXRD, SIMS, XPS and Raman spectroscopy. Microstructure of (TiAlSiY)N/MoN coating was characterized by creation of fine-grained fcc-AlTiN phase of (200) plane with congruent growth of γ-Mo2N (200) due to high isostruturality of lattices of alternating layers. The formation of fcc-AlYTiN phase of (111) plane and fcc-TiCrN phase of (200) plane were observed in multilayered (TiAlSiY)N/CrN coating and referred to the loss of clear interfaces and the formation of transition layers due to the diffusion of Ti atoms. Nano-multilayered (TiAlSiY)N/ZrN system showed the formation of stoichiometric fcc compounds of TiN with (200) plane and ZrN with (111) plane, respectively. The evaluation of mechanical properties as nanohardness, reduced elastic modulus, elastic strain prior to failure, and resistance to plastic deformation measurements was performed. The presented results showed important information about the physical and mechanical properties of new nano-multilayered systems for their subsequent application, as well as improvement of existing achievements.

中文翻译：

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(TiAlSiY)N/MeN（Me=Mo、Cr 和 Zr）的纳米多层涂层：交替层的成分对其结构和机械性能的影响

摘要 多层设计在改进功能性氮化物涂层方面具有优势，这些涂层在各种工业应用中得到广泛应用。本文报告了基于 (TiAlSiY)N 的组合纳米多层涂层的沉积和详细表征系列，并改变了交替二元层的成分。真空电弧沉积的 (TiAlSiY)N/MoN、(TiAlSiY)N/CrN 和 (TiAlSiY)N/ZrN 涂层通过各种实验技术进行分析，例如带有 EDS、XRD 和 GIXRD、SIMS、XPS 和拉曼光谱的 SEM。(TiAlSiY)N/MoN 涂层的显微结构的特点是在 (200) 面产生细晶粒 fcc-AlTiN 相，由于交替层的晶格具有高度的等结构性，因此与 γ-Mo2N (200) 的一致生长。在多层 (TiAlSiY)N/CrN 涂层中观察到 (111) 面的 fcc-AlYTiN 相和 (200) 面的 fcc-TiCrN 相的形成，这是指由于透明界面的损失和过渡层的形成Ti原子的扩散。纳米多层 (TiAlSiY)N/ZrN 系统分别显示出具有 (200) 面的 TiN 和具有 (111) 面的 ZrN 的化学计量 fcc 化合物的形成。进行了机械性能的评估，如纳米硬度、降低的弹性模量、失效前的弹性应变和抗塑性变形测量。所呈现的结果显示了有关新纳米多层系统的物理和机械性能的重要信息，以供其后续应用以及对现有成果的改进。