Abstract The paper deals with thermochromic VO2/SiO2 coatings prepared by low-temperature pulsed reactive magnetron sputtering on conventional soda-lime glass substrates without any substrate bias and without any interlayer. Thermochromic VO2 layers were deposited using reactive high-power impulse magnetron sputtering with a pulsed O2 flow control at a substrate surface temperature of 300 °C. Antireflection SiO2 layers were deposited using mid-frequency bipolar dual magnetron sputtering onto the top of VO2 layers at a surface temperature below 35 °C in order to improve the optical and mechanical performance. We focus on the dependence of the luminous transmittance (Tlum) and the modulation of the solar transmittance (ΔTsol) on the SiO2 layer thickness. The measured dependencies are in good agreement with those predicted using properties of pure VO2 layers measured by spectroscopic ellipsometry. Two different VO2 layer thicknesses (30 and 88 nm) have been used to demonstrate the tradeoff between Tlum and ΔTsol. We show an improvement due to the SiO2 overlayer of up to 16% (from 40.3% to 56.3%) for Tlum measured at 25 °C and up to 2.6% (from 7.7% to 10.3%) for ΔTsol. The results are important for the design and low-temperature fabrication of high-performance durable thermochromic VO2-based coatings for smart window applications.

中文翻译：

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低温脉冲反应磁控溅射制备热致变色VO 2 /SiO 2 涂层的性能改进：预测与实验验证

摘要 本文研究了通过低温脉冲反应磁控溅射在常规钠钙玻璃基板上制备的热致变色 VO2/SiO2 涂层，没有任何基板偏置，也没有任何夹层。热致变色 VO2 层是使用反应性高功率脉冲磁控管溅射在 300°C 的基板表面温度下通过脉冲 O2 流量控制沉积的。为了提高光学和机械性能，在表面温度低于 35°C 的情况下，使用中频双极双磁控溅射将抗反射 SiO2 层沉积到 VO2 层的顶部。我们专注于光透射率 (Tlum) 和太阳光透射率 (ΔTsol) 调制对 SiO2 层厚度的依赖性。测量的相关性与使用光谱椭偏法测量的纯 VO2 层的特性预测的那些非常一致。已使用两种不同的 VO2 层厚度（30 和 88 nm）来证明 Tlum 和 ΔTsol 之间的权衡。由于 SiO2 覆盖层在 25°C 下测量的 Tlum 最多 16%（从 40.3% 到 56.3%），ΔTsol 最多 2.6%（从 7.7% 到 10.3%），我们显示了改进。该结果对于用于智能窗户应用的高性能耐用热致变色 VO2 涂层的设计和低温制造非常重要。在 25 °C 下测量的 Tlum 为 3%），而对于 ΔTsol，则高达 2.6%（从 7.7% 到 10.3%）。该结果对于用于智能窗户应用的高性能耐用热致变色 VO2 涂层的设计和低温制造非常重要。在 25 °C 下测量的 Tlum 为 3%），而对于 ΔTsol，则高达 2.6%（从 7.7% 到 10.3%）。该结果对于用于智能窗户应用的高性能耐用热致变色 VO2 涂层的设计和低温制造非常重要。